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Bio-MEMS: Technologies and Applications by Wanjun Wang, Steven A. Soper

By Wanjun Wang, Steven A. Soper

Microelectromechanical structures (MEMS) are evolving into hugely built-in applied sciences for various program components. upload the organic measurement to the combination and a bunch of latest difficulties and concerns come up that require a vast figuring out of features from easy, fabrics, and clinical sciences as well as engineering. accumulating the efforts of well known leaders in each one of those fields, BioMEMS: applied sciences and functions offers the 1st wide-reaching survey of the layout and alertness of MEMS applied sciences to be used in organic and scientific parts. This ebook considers either the original features of organic samples and the demanding situations of microscale engineering. Divided into 3 major sections, it first examines fabrication applied sciences utilizing non-silicon methods, which use fabrics which are acceptable for medical/biological analyses. those comprise UV lithography, LIGA, nanoimprinting, injection molding, and hot-embossing. cognizance then shifts to microfluidic parts and sensing applied sciences for pattern education, supply, and research. the ultimate part outlines a number of functions and structures on the innovative of BioMEMS know-how in various parts corresponding to genomics, drug supply, and proteomics. Laying a cross-disciplinary starting place for extra improvement, BioMEMS: applied sciences and functions presents engineers with an realizing of the organic demanding situations and organic scientists with an figuring out of the engineering demanding situations of this burgeoning expertise.

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The total cooling time is about 8 Soft bake time vs. 10 Soft bake time vs. SU-8 thickness. 11 A selected soft bake profile for 1100 mm–thick SU-8 film. fm Page 28 Tuesday, November 14, 2006 10:41 AM 28 Bio-MEMS: Technologies and Applications to approximately 10 hours for a 1000 µm–thick SU-8 resist. 11. To improve the adhesion of the SU-8 film on substrate coated with Cr/Au film (as commonly used in the UV-LIGA process as the plating seed layer), a 110°C bake temperature is suggested instead of 96°C.

Fm Page 38 Tuesday, November 14, 2006 10:41 AM 38 Bio-MEMS: Technologies and Applications is based on regular lithography and surface technologies. Integrated optical systems often require the lenses’ principal planes to be perpendicular to the substrate on which the system is constructed. One approach is to use a flexible hinge [32,33]. Another is using microstereolithography [34,35]. We reported a method to obtain a quasiparabolic surface for an out-ofplane prealigned polymer microlens [25–29].

Using high-atomic-number material, typically gold, forming the absorber pattern. The thickness of the gold absorber ranges from a few micrometers when using soft x-ray photons (1 to 4 keV photon energy) up to 50 µm and more when using hard x-ray photons (50 keV) [26]. Due to this wide range of photon energies as well as different specifications regarding resist thickness, resolution, and structure tolerances, no standard mask fabrication process exists, but individual solutions are used [27–32].

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