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Acoustic Wave and Electromechanical Resonators: Concept to by Humberto Campanella

By Humberto Campanella

This groundbreaking ebook provide you with a entire knowing of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical process) resonators. For the 1st time anyplace, you discover vast assurance of those units at either the expertise and alertness degrees. This useful reference provide you with information in layout, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the mixing of those units with typical CMOS (complementary-metal-oxide-semiconductor) applied sciences, and their program to sensing and RF structures. in addition, this one-stop source appears on the major features, alterations, and barriers of FBAR, MEMS, and NEMS units, assisting you to settle on the appropriate methods on your tasks. Over 280 illustrations and greater than one hundred thirty equations help key subject matters during the ebook.

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Extra resources for Acoustic Wave and Electromechanical Resonators: Concept to Key Applications (Integrated Microsystems)

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The feature is exploited to release movable structures from the front of the wafer. Alternatively, the RIE recipe can be modified to provide an effective means of back-side processing with no considerable lateral etching. In this case, the whole bulk of the wafer is etched, whereas in most front-side etching applications, it is just partially etched [66]. 21 Bulk micromachining. RIE and DRIE are kinds of sputtering systems in which reactive species are accelerated to the substrate. Accelerated plasma ions perform the bombardment of substrate, which is achieved through appropriate biasing conditions and reactive species.

Papers IEEE Intl. , December 5–7, 2005, pp. 281–284. [44] Demirci, M. , M. A. Abdelmoneum, and C. -C. Nguyen, “Mechanically Corner-Coupled Square Microresonator Array for Reduced Series Motional Resistance,” Dig. of Tech. Papers 12th Intl. Conf. on Solid-State Sensors & Actuators TRANSDUCERS 2003, Boston, MA, June 8–12, 2003, pp. 955–958. , “Low Motional Resistance Ring-Shaped Contour-Mode Aluminum Nitride Piezoelectric Micromechanical Resonators for UHF Applications,” Proc. IEEE Intl. Conf. MEMS 2005, Miami Beach, FL, January 30–February 3, 2005, pp.

Many kinds of acoustic resonators exist. Musical instruments, for example, amplify the vibration of a string or a shock by using resonant cavities or pipes, like drums, guitars, pianos, and organs do. Thus, the instrument produces sound waves of specific tones regarding the size of the acoustic cavity. Music instruments in which the air vibrates inside the cavity with one opening are known as Helmholtz 37 38 Acoustic Microresonator Technologies resonators [1]. Herein we focus on microelectromechanical acoustic resonators and, more specifically, on piezoelectric-based acoustic resonators.

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